Mask aligner

MPA500Fab, MPA600FA, Canon mask aligner, Canon MPA

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Modification & OPTION

MODIFICATION

  • Wereplace the halogen light system to LED light
  • Focus adjustment for pieces with power motor unit
  • Chuck vacuum modification
  • Camera systems on all units
  • New covers and doors
  • Modify chucks to low contact chucks

OPTION
  • CTC/TDC unit
  • Intensity Uniformity Checker 500/600
  • Special wafer disk with hard coating pads (600/SUPER)
  • DR mask/wafer & chuck
  • Focus mask
  • Special hardware & tools
  • Conversion KIT 4, 5, 6" available MPA 600FA/SUPER,
  • Conversion KIT 3, 4, 5" available MPA500Fab
  • All necessary adjustment tools available

CONTACT USAND ASK FOR QUOTATION